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F9M4V-EP Parker Veriflo F9 Check Valve
F9M4V-EP Parker Veriflo, F9 Check Valve, VeriCleanâ„¢, 1/4" x 1/4", Male Face Seal x Male Face Seal, 3000 PSI, Ra Electropolished, 316L Stainless Steel, Fluorocarbon Elastomer Seal, Ultra High Purity, Welded, Check Valve.
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Manufacturer: Parker Hannifin
Application: Valve Manifold Box/Panel, Gas Cabinet, Gas Stick, Tool Hook-Up
Body Material: 316L Stainless Steel
Cap Style: Port Type
Disc Material: Cap Material
End Connection: Male Face Seal x Male Face Seal
End To End Distance: 1.8 in.
Features: 316L Stainless Steel Poppet/Stop Limiter
Inclusions And Features: 316L Stainless Steel Poppet/Stop Limiter, Blue Label
Nominal Size: 1/4 in. x 1/4 in.
Pressure Rating: 3000 psi (Inlet and Back)
Seal Material: Fluorocarbon Elastomer
Size: 1.8 in.
Spring Material: Elgiloy/Equivalent
Temperature Rating: -10° to 150 °F
Valve Type: Ultra-High Purity, Welded
Actuator Type: Ultra-High Purity, Welded
Product Category: Valves
Product Type: Check Valves
Brand/Division: Veriflo
Type: Welded Check Valves
Check Valve; Type Ultra-High Purity, Welded; Nominal Size 1/4 Inch x 1/4 Inch; End Connection Male Face Seal x Male Face Seal; End to End Distance 1.8 Inch; Body Material 316L Stainless Steel; Spring Material Elgiloy/Equivalent; Seal Material Fluorocarbon Elastomer; Temperature Rating -10 to 150 Deg F; Pressure Rating 3000 PSI (Inlet and Back); Inclusions/Features 316L Stainless Steel Poppet/Stop Limiter, Blue Label; Application Valve Manifold Box/Panel, Gas Cabinet, Gas Stick, Tool Hook-Up; Flow Capacity 0.9 Cv; Hex Size 7/8 Inch; Leak Rate Bubble Tight (Internal), Less than 1x10-9 SCC/Second (External); Internal Volume 0.14 Cubic Inch; Surface Finish 7 Ra Electropolished,
FEATURES
Noise Free Operation with the Patented Asymmetric Spring Design; Welded Design Reduces Footprint; Two Seal Offerings to Meet all SEMI Gas Compatibility Requirements; Class 100 Clean Room Assembled and Packaged; VeriClean 316L Stainless Steel Enhances Electropolishing and Corrosion Resistance
Series/Model Information
Parker Veriflo Division's F9 Series UHP Check Valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition. The F9's two seal materials meet all Semi gas compatibility requirements, reducing customer inventories and meeting a wider range of applications. Assembled and packaged in a Class 100 clean room, the F9 is designed for use in ultrahigh purity semiconductor applications.
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