Gas Measured Nitrogen Trifluoride (NF3)
Cartridge Part Number MIDAS-S-XHF 1 year standard warranty
MIDAS-E-XHF 2 year extended warranty
Sensor Technology 3 electrode electrochemical cell
Measuring Range (ppm) NF3 0 - 40 ppm
Minimum Alarm 1 Set Point 4.0ppm
Repeatability < ± 10% of measured value
Linearity < ± 20% of measured value
Response Time t 62.5 < 110 seconds
Sensor Cartridge Life Expectancy ≥ 24 months under typical application conditions
Operating Temperature 0°C to +40°C (32°F to 104°F)
Effect of Temperature < ± 0.002ppm / °C (at 0°C to 20°C)
Zero < ± 0.008ppm / °C (at 20°C to 40°C)
Sensitivity < ± 0.4% of measured value / °C
Operating Humidity (continuous) 20 – 75% rH 1
Effect of Humidity
Zero < ± 0.003ppm / % rH
Sensitivity < ± 1% of measured value / % rH
Operating Pressure 90 - 110kPa
Effect of Position No effect in typical application
Long Term Drift
Zero No drift
Sensitivity < 15% of measured value / year
Calibration Gas Hydrogen Fluroide (HF)
Challenge Gas (Bump Test) Chlorine (Cl2 )
Warm Up Time < 20 minutes
Storage Temperature +5°C to +25°C (+41°F to +77°F)
