英特格ENTEGRIS纯化器现货，

GPUS300NCX04R02CA，36个

GPUS5000FHX08R00CA，36个

GPUS5000FIX08R00CA，2个

Entegris 的 9N 气体纯化器是一类能将气体纯度提升至 9 个 9（即杂质含量小于 1ppb）级别的高端纯化设备，结合你提到的适用气体种类及流量参数，其相关特性如下：

适用气体：可对 N₂、Ar、He、Kr、Ne、Xe 等惰性气体，以及 CF₄、CH₄、C₂H₆、C₃H₈、C₄H₁₀等卤代烃和烃类气体进行纯化。

不同气体的纯化原理和内部配置可能会有差异，但均旨在高效去除其中的 H₂O、O₂、CO、CO₂、烃类等杂质，以满足半导体、科研等对气体纯度要求极高的领域需求。

流量规格：流量为 500slpm（标准升每分钟），属于中流量级别。

Entegris 有不同系列的产品可覆盖该流量需求，例如其 GateKeeper 系列部分型号能满足类似流量范围，可根据具体工艺需求和其他参数进一步选型适配。

纯度性能：作为 9N 级纯化器，通常要求进气纯度在 5 个 9 及以上，经过纯化后可实现气体杂质含量低于 1ppb 的超纯水平，

能够为对气体纯度极为敏感的工艺环节提供稳定可靠的高纯气体供应。

 MICROCONTAMINATION CONTROL
GateKeeper
 GPU 
IX Media Gas Purifiers
Superior purity control
Entegris’ GateKeeper GPU gas purifiers were designed 
to improve purity consistency, lifetime, and final purity in 
microelectronics applications where high-purity gas is critical. 
Leveraging our expertise in material science, we have developed 
a new generation of IX gas purification products that deliver 
unsurpassed value and performance.
APPLICATIONS
—
• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar
FEATURES & BENEFITS
—
Process control and protection Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
CE certified to the Pressure Equipment Directive (PED) 
Manufactured in an ISO 9001:2015 facility
Cost effective Regenerable – eliminates disposal issues and costs
Long lifetime — improves cost of ownership
Safe and simple to use Uses ambient temperature purification — no heat or power required to operate

Insensitive to orientation (horizontal / vertical) 

 

 

 

 Outlet particle filter Wafergard — 316 stainless steel membrane, 20 μm or 0.0015 μm
Lifetime One year with an inlet challenge of 1 ppm moisture and 1 ppm oxygen with flow 
rates shown on the next page.
The lifetime varies with the inlet impurities and flow rate. Contact Entegris for 
application specific lifetime calculations.
Regenerable Yes (Regeneration is not recommended if process gas is CF4)
Dangerous goods (DG) Yes, UN3190, Class 4.2
Operating temperature 0°  – 65°C (32°  – 149°F)
Leak rating 1 × 10-9 atm ccc of He
Materials of construction Housing: 316L stainless steel
Certification CE certified to the Pressure Equipment Directive (PED)
Designed in accordance with ASME

OPERATING SPECIFICATIONS

GPU 15 0.5 slpm 0.3 slpm 2,000 psig 250 psig – 0.1 psid

GPU 35 1 slpm 1.0 slpm 1,400 psig 250 psig – 0.3 psid

GPU 70 5 slpm 1.6 slpm 1,400 psig 250 psig – 0.5 psid

GPU 80 10 slpm 1.9 slpm 1,400 psig 250 psig – 1.0 psid

GPU 100 20 slpm 2.6 slpm 1,000 psig 250 psig – 16.7 psid

GPU 200 20 slpm 4.2 slpm 800 psig 250 psig – 0.7 psid

GPU 300 50 slpm 6.3 slpm 800 psig 250 psig – 1.3 psid

GPU 500 75 slpm 13.0 slpm 600 psig 250 psig – 1.3 psid

GPU 700 120 slpm 18.0 slpm 600 psig 250 psig – 1.8 psid

GPU 2500 4R 300 slpm 65.0 slpm 505 psig 250 psig – 5.0 psid

GPU 2500 8R 500 slpm 65.0 slpm 505 psig 250 psig – 5.6 psid

GPU 3000 500 slpm 75.0 slpm 505 psig 250 psig – 5.6 psid

GPU 5000 500 slpm 125.0 slpm 505 psig 250 psig – 7.0 psid

GPU 10M 8R 1,000 slpm 260.0 slpm 370 psig 250 psig – 5.8 psid

GPU 10M 12R 1,000 slpm 260.0 slpm 370 psig 250 psig – 8.0 psid

GPU 13M 12R 2,000 slpm 320.0 slpm 370 psig 250 psig 2.0 psid –

GPU 13M 16R 2,500 slpm 320.0 slpm 370 psig 250 psig 3.0 psid –

GPU 17M 12R 2,000 slpm 400.0 slpm 370 psig 250 psig 2.0 psid –

GPU 17M 16R 2,500 slpm 400.0 slpm 370 psig 250 psig 3.0 psid –

GPU 20M 12R 2,000 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid

GPU 20M 16R 2,500 slpm 480.0 slpm 370 psig 250 psig – 19.0 psid

*Purifier only at maximum flow rating with 90 psig inlet pressure

FACILITY SPECIFICATIONS

GPU 15 1/4" Male/male 25.4 mm (1.0") 84 mm (3.3") 0.2 kg (0.4 lbs)

GPU 35 1/4" Male/male 38.1 mm (1.5") 84 mm (3.3") 0.3 kg (0.7 lbs)

GPU 70 1/4" Male/male 38.1 mm (1.5") 114 mm (4.5") 0.3 kg (0.7 lbs)

GPU 80 1/4" Male/male 38.1 mm (1.5") 127 mm (5.0") 0.3 kg (0.7 lbs)

GPU 100 1/4” Male/male N/A 84 mm (3.3") 0.9 kg (2.0 lbs)

GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)

GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)

GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)

GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)

GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)

GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)

GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)

GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)

GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)

GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)

GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)

GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)

GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)

GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)

GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)

GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)

GPU 15 1/4" Female/female 25.4 mm (1.0") 234 mm (9.2") 1.1 kg (2.4 lbs)

GPU 35 1/4" Female/female 38.1 mm (1.5") 234 mm (9.2") 1.2 kg (2.6 lbs)

GPU 70 1/4" Female/female 38.1 mm (1.5") 264 mm (10.4") 1.3 kg (2.9 lbs)

GPU 80 1/4" Female/female 38.1 mm (1.5") 277 mm (10.9") 1.3 kg (2.9 lbs)

GPU 100 1/4” Female/female N/A 234 mm (9.2") 1.3 kg (2.9 lbs)

GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)

GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)

GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)

GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)

GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)

GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)

GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)

GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)

GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)

GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)

GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)

GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)

GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)

GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)

GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)

GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)

GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)